Presentation Information

[2P28]Photoreaction properties of photoacid generators under plasmon resonance

*Honoka Ohgi1, Sarasa Kano1, Keisuke Imaeda2, Sou Ryuzaki2, Kosei Ueno2 (1. Grad. Sch. of Chem. Sci. and Eng., Hokkaido Univ., 2. Fac. Sci., Hokkaido Univ.)

Keywords:

Plasmon,Photo acid generator,Photolithography