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Sol-gel Derived Epitaxial Pb(Zr,Ti)O<sub>3</sub> Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure

[P02] Poster session

International Workshop on 11th Piezoelectric MEMS

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[20111-20-02]Sol-gel Derived Epitaxial Pb(Zr,Ti)O₃ Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure

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[20111-20-02]Sol-gel Derived Epitaxial Pb(Zr,Ti)O3 Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure

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[20111-20-02]Sol-gel Derived Epitaxial Pb(Zr,Ti)O₃ Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure