International Workshop on 11th Piezoelectric MEMS
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Session Details

Poster presentation

[P02] Poster session

Tue. Nov 4, 2025 1:45 PM - 3:15 PM JST
Tue. Nov 4, 2025 4:45 AM - 6:15 AM UTC
Meeting room 4-6(Meeting room on 4th Floor)

[20111-20-01]Advancing Nb-Doped PZT Thin Film Technologies: Fujifilm's Latest Progress

*Takayuki Naono1, Tsutomu Sasaki1, Hiroshi Ohta1, Shuji Takahashi1, Yoshikazu Hishinuma1 (1. Fujifilm corporation)
Comment()

[20111-20-02]Sol-gel Derived Epitaxial Pb(Zr,Ti)O3 Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure

*Sang Hyo Kweon1, Isaku Kanno1 (1. Kobe University)
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[20111-20-03]Templated Pb(Zr,Ti)O3 growth using seed layers on various substrates

*Pierre-Alexis Repecaud1, Ertug Şimşek1, Muharrem Bayraktar1 (1. University of Twente)
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[20111-20-04]Feasibility Study on Forming Artificial Grain Boundary in Monocrystalline Pb(Zr, Ti)O3 Thin Films for Tunning of Mechanical Toughness

*Yusaku Katagai1, Akihiko Teshigahara1, Shinya Yoshida1 (1. Shibaura Institute of Technology)
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[20111-20-05]Combinatorial Sputtering of Mn-(K,Na)NbO3 Thin Films

*Jingwei He1, Isaku Kanno1 (1. Kobe Univ.)
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[20111-20-06]Ferroelectricity of La-doped ZnO thin films

*Yudai Yoshino1, Atsuhiro Tamai1, Jingwei He1, Sanghyo Kweon1, Hideaki Adachi1, Isaku Kanno1 (1. Kobe Univ.)
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[20111-20-07]Digitalization of magnetron sputter processes for deposition of piezoelectric thin films

*Stephan Barth1, Hagen Bartzsch1, Thomas Schütte2, Jan-Peter Urbach2, Fabian Neuhaus3, Martin Glauer3, Emanuel Leipner4, Matthias Nestler5, Christian Käpplinger6 (1. Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Germany, 2. PLASUS GmbH, Germany, 3. Otto von Guericke University of Magdeburg, Germany, 4. TU Bergakademie Freiberg, Germany, 5. scia Systems GmbH, Germany, 6. PVA TePla Analytical Systems GmbH, Germany)
Comment()

[20111-20-08]Growth and Electrical Characterization of BiFeO3-BaTiO3 Epitaxial Films on Si

*Yuji Ashida1, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka metropolitan University)
Comment()

[20111-20-09]Polarity control of Sc-AlN films deposited by Industrial Scale Reactive Magnetron Sputtering

*Volker Roebisch1, Demian Henzen1, Antonio Verdicchia1, Martin Kratzer1, Oguz Yildirim1, Dino Faralli1, Bernd Heinz1 (1. EVATEC AG, Switzerland)
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[20111-20-10]Theoretical Insights into Ferroelastic Domain Dynamics and Their Impact on Dielectric and Piezoelectric Responses

*Xiaochuan Sun1, Haowen Sun, Yue Liu (1. Shanghai Jiao Tong Univ.)
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