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Combinatorial Sputtering of Mn-(K,Na)NbO<sub>3</sub> Thin Films

[P02] Poster session

International Workshop on 11th Piezoelectric MEMS

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[20111-20-05]Combinatorial Sputtering of Mn-(K,Na)NbO₃ Thin Films

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[20111-20-05]Combinatorial Sputtering of Mn-(K,Na)NbO3 Thin Films

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[20111-20-05]Combinatorial Sputtering of Mn-(K,Na)NbO₃ Thin Films