Presentation Information
[20111-20-07]Digitalization of magnetron sputter processes for deposition of piezoelectric thin films
*Stephan Barth1, Hagen Bartzsch1, Thomas Schütte2, Jan-Peter Urbach2, Fabian Neuhaus3, Martin Glauer3, Emanuel Leipner4, Matthias Nestler5, Christian Käpplinger6 (1. Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Germany, 2. PLASUS GmbH, Germany, 3. Otto von Guericke University of Magdeburg, Germany, 4. TU Bergakademie Freiberg, Germany, 5. scia Systems GmbH, Germany, 6. PVA TePla Analytical Systems GmbH, Germany)
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