[4-3] Thin film fabrication (wurtzite)

3:15 PM - 3:45 PM JST(6:15 AM - 6:45 AM UTC)Invited speaker

[4-3-01] Highly-doped Al_0.55Sc_0.45N piezoelectric films for applications in MEMS devices: an alternative to replace perovskite-oxide piezoelectric films

*Minh Duc Nguyen^1,2, Matthijn Dekkers², Gertjan Koster¹, Guus Rijnders¹ (1. MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands , 2. Lam Research International B.V., Auke Vleerstraat 3, 7521PE Enschede, The Netherlands)