[4-3] Thin film fabrication (wurtzite)

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[4-3-03] Understanding the impact of oxygen concentration in Al_0.60Sc_0.40-targets for reduced costs and environmental-foodprint of mass produced AlScN thin films

*Georg Schönweger^1,2, Tom-Niklas Kreutzer², Simon Fichtner^1,2 (1. Institute for Material Science, Kiel University, Kiel, Germany, 2. Fraunhofer Institute for Silicon Technology (ISIT), Itzehoe, Germany)