[4-4] Acoustic and audio-related devices

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[4-4-02] Thin Parylene-C Process Flow Integration and Patterning with Silicon-based Piezoelectric MEMS for PMUTs on 8-inch Wafers

*Adrien PIOT¹, Mohammadsadegh Namnabat¹, Alexander Shatalov¹, Álvaro Juliánand Rosa¹, Javad Abbaszadeh¹ (1. Piezoelectric Microsystem Technologies, Silicon Austria Labs GmbH, Villach, Austria)