[4-4] [4-4] Acoustic and audio-related devices | International Workshop on 11th Piezoelectric MEMS

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Session Details

Oral presentation

[4-4] Acoustic and audio-related devices

Tue. Nov 4, 2025 4:45 PM - 6:00 PM JST
Tue. Nov 4, 2025 7:45 AM - 9:00 AM UTC

Oral session(Aimesse Hall)

4:45 PM - 5:15 PM JST(7:45 AM - 8:15 AM UTC)Invited speaker

[4-4-01]Piezoelectric MEMS Acoustic Transducer: Next-Generation Acoustics

*Yipeng Lu¹ (1. Peking University)

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5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[4-4-02]Thin Parylene-C Process Flow Integration and Patterning with Silicon-based Piezoelectric MEMS for PMUTs on 8-inch Wafers

*Adrien PIOT¹, Mohammadsadegh Namnabat¹, Alexander Shatalov¹, Álvaro Juliánand Rosa¹, Javad Abbaszadeh¹ (1. Piezoelectric Microsystem Technologies, Silicon Austria Labs GmbH, Villach, Austria)

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5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[4-4-03]High-Performance and Robust Polymer based Piezoelectric Actuators for Miniaturized In-Ear Headphone Applications

*Christian Novotny¹, Samu Horvath¹, Jascha Blinzer¹, Andrea Rusconi¹ (1. USound GmbH)

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5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[4-4-04]A polymer-based MEMS loudspeaker actuated by a PZT thin film

*Gwenaël LE RHUN¹, Romain LIECHTI¹, Timothée ROTROU¹, Christel DIEPPEDALE¹ (1. CEA-Leti)

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