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High-Piezoelectric Single-Crystal AlN Films Epitaxially Grown on 6- and 8-inch Si Wafers with an Oxide Buffer Layer

[5-2] Thin film fabrication

International Workshop on 11th Piezoelectric MEMS

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[5-2-03]High-Piezoelectric Single-Crystal AlN Films Epitaxially Grown on 6- and 8-inch Si Wafers with an Oxide Buffer Layer

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