International Workshop on 11th Piezoelectric MEMS
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Session Details

Oral presentation

[5-2] Thin film fabrication

Wed. Nov 5, 2025 10:45 AM - 12:15 PM JST
Wed. Nov 5, 2025 1:45 AM - 3:15 AM UTC
Oral session(Aimesse Hall)
10:45 AM - 11:15 AM JST(1:45 AM - 2:15 AM UTC)Invited speaker

[5-2-01]Martensite Epitaxy

*Takeshi Kijima1,2, Isao Kimura1, Masashi Seki1, Hitoshi Tabata2, Kento Nakao1 (1. Gaianixx.Inc , 2. The universiy of Tokyo)
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11:15 AM - 11:45 AM JST(2:15 AM - 2:45 AM UTC)Invited speaker

[5-2-02]Study of KNN morphotropic phase boundary compositions for enhanced piezoelectric
response

*Fabio Melzi1, Giulia Pavese2, Federico Maspero2, Walter Piazzi2, Marco Asa2, Andrea Picco1, Laura Castoldi1, Miguel Badillo2, Riccardo Bertacco2 (1. STMicroelectronics, 2. Politecnico di Milano, Dipartimento di Fisica)
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11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[5-2-03]High-Piezoelectric Single-Crystal AlN Films Epitaxially Grown on 6- and 8-inch Si Wafers with an Oxide Buffer Layer

*Azusa N. Hattori1, Osamu Nakagawara1, Kenji Ogata1 (1. I-PEX Piezo Solutions Inc.)
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12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[5-2-04]Improving stress control of PVD deposited materials using in-line measurement

*Alice Alexandra Wood1, Scott Haymore1, Tony Wilby1, Tal Goichman2, Boaz Rosenberg2 (1. KLA Corporation (Newport), 2. KLA Corporation (Yavne))
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