Presentation Information
[P01-06]PiezoMEMS Array Fabrication on Flexible Stainless-Steel Substrate
*Kae Nakamura1,2, Stanislav Udovenko1,2, Thomas Jackson3, Susan Trolier-McKinstry1,2 (1. Department of Materials Science and Engineering, The Pennsylvania State Univeristy, 2. Materials Research Institute, The Pennsylvania State University, 3. School of Electrical Engineering and Computer Science, The Pennsylvania State University)
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