International Workshop on 11th Piezoelectric MEMS
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Session Details

Poster presentation

[P01] Poster session

Tue. Nov 4, 2025 1:45 PM - 3:15 PM JST
Tue. Nov 4, 2025 4:45 AM - 6:15 AM UTC
Meeting room 1, 2(Meeting room on 4th Floor)

[P01-01]Epitaxial Growth of BiFeO3 Thin Films on Si Substrates and Their Neuromorphic Acoustic Sensor Applications

*Takeshi Yoshimura1, Sengsavang Aphayvong1, Meika Takagi1, Yohane Fujibayashi1, Sena Yamamoto2, Mario Kiuchi2 (1. Osaka Metro. Univ., 2. Sumitomo Precision Products Co., Ltd,)
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[P01-02]In-sensor reservoir computing using piezoelectric resonators for motor current signature analysis

*Kei Nishimura1, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka Metro. Univ.)
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[P01-03]Feasibility Study of BAW Resonator Mounted with Single Crystal PZT Thin Film for Application to Gyroscope

*Yujiro Iwata1, Shinya Yoshida1 (1. Shibaura Institute of Technology)
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[P01-04]Frequency Trimming of pMUT Array Using Polymer Patterns

*Nathapol Siriphokkul1, Andrea Vergara1, Shuji Tanaka1 (1. Tohoku Univerty)
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[P01-05]Wireless power transfer application of piezoelectric MEMS resonators using BiFeO3 epitaxial films

*Kira Fujihara1, Sengsavang Aphayvong1, Meika Takagi1, Shuichi Murakami2, Hidemasa Yamane2, Sena Yamamoto3, Mario Kiuchi3, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka Metro. Univ., 2. ORIST, 3. SPP)
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[P01-06]PiezoMEMS Array Fabrication on Flexible Stainless-Steel Substrate

*Kae Nakamura1,2, Stanislav Udovenko1,2, Thomas Jackson3, Susan Trolier-McKinstry1,2 (1. Department of Materials Science and Engineering, The Pennsylvania State Univeristy, 2. Materials Research Institute, The Pennsylvania State University, 3. School of Electrical Engineering and Computer Science, The Pennsylvania State University)
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[P01-07]A HYBRID MEMS - COMBINING PIEZOELECTRIC AND FERROELECTRIC THIN-FILM FUNCTIONALITIES

Linet Thomas C1, Praveen Kumar1, *Gayathri Pillai1 (1. Indian Institute of Science)
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[P01-08]aixSCAN: A New Standard Turnkey Solution in MEMS Testing and Characterization

*Peter Mardilovich1, Tom Kremers1, Roland Kessels1, Carlos Fragkiadakis1, Thorsten Schmitz-Kempen1, Stephan Tiedke1 (1. aixACCT Systems)
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[P01-09]Sputtered PZT in production at Bosch: Monitoring and operation

*Mathias Mews1 (1. Robert Bosch GmbH)
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[P01-10]Characterizing electrical and mechanical performance of PMEMS devices

*Michael S McDaniel1, Joe T Evans1, Sean Smith1 (1. Radiant Technologies)
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[P01-11]Advancing Nb-Doped PZT Thin Film Technologies: Fujifilm's Latest Progress

*Takayuki Naono1, Tsutomu Sasaki1, Hiroshi Ohta1, Shuji Takahashi1, Yoshikazu Hishinuma1 (1. Fujifilm corporation)
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[P01-12]Sol-gel Derived Epitaxial Pb(Zr,Ti)O3 Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure

*Sang Hyo Kweon1, Isaku Kanno1 (1. Kobe University)
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[P01-13]Templated Pb(Zr,Ti)O3 growth using seed layers on various substrates

*Pierre-Alexis Repecaud1, Ertug Şimşek1, Muharrem Bayraktar1 (1. University of Twente)
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[P01-14]Feasibility Study on Forming Artificial Grain Boundary in Monocrystalline Pb(Zr, Ti)O3 Thin Films for Tunning of Mechanical Toughness

*Yusaku Katagai1, Akihiko Teshigahara1, Shinya Yoshida1 (1. Shibaura Institute of Technology)
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