Presentation Information
[P02-08]A High Coupling-efficiency Actuator Fabricated by a Wafer-level Piezoelectric MEMS Process with Optimized Multilayer Stacks and Improved Thermal Budget
*Aocheng Bao1, Chong Yang2, Bowen Sheng1, Haixia Zhang1, Dunshan Yu2, Yipeng Lu1 (1. School of Integrated Circuits, Peking University, China, 2. School of Software and Microelectronics, Peking University, China)
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