International Workshop on 11th Piezoelectric MEMS
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Session Details

Poster presentation

[P02] Poster session

Tue. Nov 4, 2025 1:45 PM - 3:15 PM JST
Tue. Nov 4, 2025 4:45 AM - 6:15 AM UTC
Meeting room 4-6(Meeting room on 4th Floor)

[P02-01]Combinatorial Sputtering of Mn-(K,Na)NbO3 Thin Films

*Jingwei He1, Isaku Kanno1 (1. Kobe Univ.)
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[P02-02]Ferroelectricity of La-doped ZnO thin films

*Yudai Yoshino1, Atsuhiro Tamai1, Jingwei He1, Sanghyo Kweon1, Hideaki Adachi1, Isaku Kanno1 (1. Kobe Univ.)
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[P02-03]Digitalization of magnetron sputter processes for deposition of piezoelectric thin films

*Stephan Barth1, Hagen Bartzsch1, Thomas Schütte2, Jan-Peter Urbach2, Fabian Neuhaus3, Martin Glauer3, Emanuel Leipner4, Matthias Nestler5, Christian Käpplinger6 (1. Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Germany, 2. PLASUS GmbH, Germany, 3. Otto von Guericke University of Magdeburg, Germany, 4. TU Bergakademie Freiberg, Germany, 5. scia Systems GmbH, Germany, 6. PVA TePla Analytical Systems GmbH, Germany)
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[P02-04]Growth and Electrical Characterization of BiFeO3-BaTiO3 Epitaxial Films on Si

*Yuji Ashida1, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka metropolitan University)
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[P02-05]Polarity control of Sc-AlN films deposited by Industrial Scale Reactive Magnetron Sputtering

*Volker Roebisch1, Demian Henzen1, Antonio Verdicchia1, Martin Kratzer1, Oguz Yildirim1, Dino Faralli1, Bernd Heinz1 (1. EVATEC AG, Switzerland)
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[P02-06]Theoretical Insights into Ferroelastic Domain Dynamics and Their Impact on Dielectric and Piezoelectric Responses

*Xiaochuan Sun1, Haowen Sun, Yue Liu (1. Shanghai Jiao Tong Univ.)
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[P02-07]Electrode dependent thermal stability evaluation of PZT thin films

*Chong Yang1, Aocheng Bao1, Pin Yin1, Bowen Sheng1, Dunshan Yu1, Yipeng Lu1 (1. Peking University)
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[P02-08]A High Coupling-efficiency Actuator Fabricated by a Wafer-level Piezoelectric MEMS Process with Optimized Multilayer Stacks and Improved Thermal Budget

*Aocheng Bao1, Chong Yang2, Bowen Sheng1, Haixia Zhang1, Dunshan Yu2, Yipeng Lu1 (1. School of Integrated Circuits, Peking University, China, 2. School of Software and Microelectronics, Peking University, China)
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[P02-09]Beyond Resonance: Spectrum And Phase as Design Tools for Multi-Frequency PMUTs

*Jinghan Gan1, Bowen Sheng1, Yipeng Lu1 (1. Peking University)
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