Presentation Information

[Mo2d-O32-04]High resolution study of thermally grown interfacial oxide thickness during poly-Si passivating contact formation

*Anitta Rose Varghese1, Rabin Basnet1, Sieu Pheng Phang1, Felipe Kermer2, Frank Brink2, Daniel Macdonald1 (1. School of Engineering, The Australian National University, Canberra (Australia), 2. Centre for Advanced Microscopy, The Australian National University, Canberra (Australia))