Presentation Information
[251T]Development of a sample cell for estimation of copper plating film formation process by in-situ neutron reflectometry
*Noboru Miyata1, Ayumu Takada2, Yasuharu ohgoe2, Hiroshi Kira1, Kazuki Mita1, Hiroyuki Aoki3,4 (1. CROSS, 2. 東京電機大学大学院, 3. JAEA J-PARCセンター, 4. KEK物構研)