Presentation Information

[G045]Development and Application of a Gradient Deposition System for Integrated Evaluation of Sample with Continuous Thickness Gradients

*Kazuhide Kikuchi1, Tatsuhiro Koda1, Shumpei Sekiuchi1, Kazuhiko Mase2,3, Kennichi Ozawa2,3, Yasuo Nakayama1, Hiroyuki Hattori1 (1. Tokyo University of Science, 2. KEK Photon Factory, 3. The Graduate University for Advanced Studies,)