Presentation Information
[P-25]Multi-Stage Etch Recipe Inverse Design: Bridging Expert Behavioral Cloning and Reinforcement Learning
*Jianming Guo1, Mingqiang Geng1, Zhengming Liu2, Dianyu Qi1, Dong Ni1, Dawei Gao1,2 (1. Zhejiang Univ., 2. Zhejiang ICsprout Semiconductor Co., Ltd.)
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