Presentation Information

[P-28]Impact of Surface Charging on Feature Profile Evolution in 3D NAND Pillar Etching

*Siddharth Mohanty1, Vatsal Thakor2, Om Maheshwari1, Nihar Ranjan Mohapatra1 (1. Indian Inst. of Tech. Gandhinagar, India, 2. Nirma Univ., India)

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