Presentation Information
[P-29]Pulsed Bias Etching of Silicon Pillar Arrays: Experiment and Surface-Memory Simulation of Loading Control
*Jianming Guo1, Zhengming Liu2, Mingqiang Geng1, Kunrun Song2, Huiyun Jiang1,2, Dong Ni1, Dawei Gao1,2 (1. Zhejiang Univ., 2. Zhejiang ICsprout Semiconductor Co., Ltd.)
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