[Session 1] Session 1: Memory Devices

1:30 PM - 1:50 PM JST(4:30 AM - 4:50 AM UTC)

[Session_1-02] Simulation Study on Scaling Limits of Z-direction Pitch in 3D Flash Memories: Toward the Sub-40 nm Regime

*Tatsuo Ogura¹, Yuma Hizume¹, Yuto Ozeki¹, Takayuki Kakegawa¹, Hiroshi Takeda¹, Takashi Kurusu¹, Tomohiro Oki¹, Katsuyuki Sekine¹ (1. KIOXIA Corp.)