[Session 11] Session 11: Artificial Intelligence and Machine Learning

1:00 PM - 1:20 PM JST(4:00 AM - 4:20 AM UTC)

[Session_11-01] Atomistic Modeling of Mg-Ion Implantation into GaN using an Efficient Machine-Learned Interatomic Potential

*Yuki Ohuchi^1,3, Robert Stella^2,3, Sabine Leroch^2,3, Lado Filipovic^2,3 (1. Advanced Technology Laboratory, Fuji Electric Corp. Ltd., 2. CDL for Multi-Scale Process Modeling of Semiconductor Devices and Sensors at the, 3. Inst. for Microelectronics, TU Wien)