[Session 6] Session 6: Process Simulation

11:10 AM - 11:30 AM JST(2:10 AM - 2:30 AM UTC)

[Session_6-05] Surrogate-Assisted Calibration of a DRIE Process Model

*Roman Kostal¹, Manuel Kleinbichler³, Stefano Di Nicola⁴, Lado Filipovic^1,2 (1. Inst. for Microelectronics, Tech. Univ. Vienna, 2. CDL for Multi-Scale Process Modeling of Semiconductor Devices and Sensors, 3. KAI Kompetenzzentrum Automobil- und Industrieelektronik GmbH, 4. Infineon Technologies Austria AG)