[Session 9] Session 9: Advanced CMOS Devices

9:50 AM - 10:10 AM JST(12:50 AM - 1:10 AM UTC)

[Session_9-03] Multiscale Modeling of Channel Surface Roughness: Impact on Front-End-of-Line And Circuit Performance for Advanced Logic Technology

Ning Yang¹, Pratik B. Vyas¹, Rohit Gupta¹, *Ashish Pal¹, El Mehdi Bazizi¹, Subi Kengeri¹ (1. Applied Materials Inc.)