[2] Stacked Architecture and 3D Integration

9:50 AM - 10:10 AM JST(12:50 AM - 1:10 AM UTC)

[2-01] First Realization of ALD based Sn-Doped InGaZnO with Reliability Enhancements for Monolithic 3D Integratation

*Sung-Hun Kim¹, Sun Hong Choi¹, Kota Sakai¹, Takuya Saraya¹, Toshiro Hiramoto¹, Masaharu Kobayashi^1,2 (1. IIS, Univ. of Tokyo (Japan), 2. d.lab, Univ. of Tokyo (Japan))