[2] Stacked Architecture and 3D Integration | SNW2025

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Session 2: Stacked Architecture and 3D IntegrationSession 2: Stacked Architecture and 3D Integration

[2]Stacked Architecture and 3D Integration

Sun. Jun 8, 2025 9:50 AM - 10:50 AM JST
Sun. Jun 8, 2025 12:50 AM - 1:50 AM UTC

Suzaku III(Suzaku III)

Chair:Katsuhiro Tomioka(Hokkaido University), Masaharu Kobayashi(The University of Tokyo)

9:50 AM - 10:10 AM JST(12:50 AM - 1:10 AM UTC)

[2-01]First Realization of ALD based Sn-Doped InGaZnO with Reliability Enhancements for Monolithic 3D Integratation

*Sung-Hun Kim¹, Sun Hong Choi¹, Kota Sakai¹, Takuya Saraya¹, Toshiro Hiramoto¹, Masaharu Kobayashi^1,2 (1. IIS, Univ. of Tokyo (Japan), 2. d.lab, Univ. of Tokyo (Japan))

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10:10 AM - 10:30 AM JST(1:10 AM - 1:30 AM UTC)

[2-02]Optimizing CFET Parasitic Capacitance and Performance Through Middle Dielectric Isolation and Middle Via Integration

*Meng-Lin Wu¹, Yu-Cheng Lu¹, Vita Pi-Ho Hu¹ (1. National Taiwan University (Taiwan))

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10:30 AM - 10:50 AM JST(1:30 AM - 1:50 AM UTC)

[2-03]Controlling phosphorus doping at the nanoscale to promote synthetic spin orbit coupling in silicon

*Michele Perego¹, Stefano Kuschlan¹, Francesc Perez-Murano², Jordi Llobet², Marta Fernandez-Regulez², Riccardo Chiarcos³, Michele Laus³, Gabriele Seguini¹, Andrea Pulici¹, Graziella Tallarida¹ (1. Consiglio Nazionale delle Ricerche (Italy), 2. Inst. of Microelectronics of Barcelona (Spain), 3. Univ. del Piemonte Orientale (Italy))

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