[2] Stacked Architecture and 3D Integration

10:30 AM - 10:50 AM JST(1:30 AM - 1:50 AM UTC)

[2-03] Controlling phosphorus doping at the nanoscale to promote synthetic spin orbit coupling in silicon

*Michele Perego¹, Stefano Kuschlan¹, Francesc Perez-Murano², Jordi Llobet², Marta Fernandez-Regulez², Riccardo Chiarcos³, Michele Laus³, Gabriele Seguini¹, Andrea Pulici¹, Graziella Tallarida¹ (1. Consiglio Nazionale delle Ricerche (Italy), 2. Inst. of Microelectronics of Barcelona (Spain), 3. Univ. del Piemonte Orientale (Italy))