[5] Memory and Related Technologies

3:45 PM - 4:05 PM JST(6:45 AM - 7:05 AM UTC)

[5-03] Thermally Stable Vertical-Stacked 1T1C FeRAM with Record 3.3 μF/cm2 CMW Based on Unified Ferroelectric-Oxide Semiconductor Stack

Xujin Song^1,2, *Dijiang Sun^1,2, Jiajia Zhang^1,2, Chenxi Yu^1,2, Xiaoyan Liu^1,2, Jinfeng Kang^1,2 (1. Peking University (China), 2. Beijing Advanced Innovation Center for Integrated Circuits (China))