[6] Poster Session

[6-01] Integration of Optimized Superlattice HfO₂/ZrO₂ Dielectric into High-Performance Superlattice SiGe/Si p-type GAAFETs

*Kai-Ting Huang¹, Yi-Ju Yao¹, Heng-Jia Chang², Chen-You Wei¹, Yu-Min Fu¹, Bo-Xu Chen², Tsai-Jung Lin¹, Yung-Teng Fang², Guang-Li Luo³, Fu-Ju Hou³, Yung-Chun Wu^1,2 (1. College of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 2. Dept. of Engineering and System Science, National Tsing Hua Univ. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))