[6] Poster Session

[6-02] BEOL-Compatible GAAFET Hybrid Memory Based on HfO₂/ZrO₂ Superlattice with Morphotropic Phase Boundary

*Kuei-Chun Liao¹, Chen-You Wei¹, Yi-Ju Yao¹, Cheng-En Wu², Chien-Lung Chen², Chih-Chao Yang³, Guang-Li Luo³, Fu-Ju Hou³, Yung-Chun Wu^1,2 (1. College of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 2. Dept. of Engineering and System Science, National Tsing Hua Univ. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))