[6] Poster Session

[6-03] Study on the Application and Reliability of High-k HfO₂/ZrO₂ Superlattice Dielectrics in Ge Stacked Nanosheet GAAFET at 4K Ultra-Low Temperature

*KAO TZU-I¹, Huang Kai-Wei¹, Wei Chen-You², Lin Yi-Wen¹, Hou Fu-Ju³, Luo Guang-Li ³, Wu Yung-Chun^1,2 (1. Dept. of Engineering and System Science, National Tsing Hua Univ. (Taiwan), 2. College of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))