Presentation Information
[6-04]Enhanced Reliability and Wake-Up Free Behavior of HfO2/ZrO2 Superlattice FeRAM With Triple-Level Cell Using High- and Low-Temperature ALD Stacks
*Kuan-Wen Huang1, Kun-Tao Lin1, Yu-Yun Wang1, Tien-Sheng Chao1 (1. Univ. of National Yang Ming Chiao Tung (Taiwan))
Comment
To browse or post comments, you must log in.Log in