[6] Poster Session

[6-10] BEOL-Compatible Microwave Annealing of HfO₂/ZrO₂ Superlattice Super High-K: Stabilizing Morphotropic Phase Boundaries and Low Leakage Current

*Chen-You Wei¹, Yu-Hong Chen², Yi-Ju Yao¹, Guang-Li Luo³, Fu-Ju Hou³, Yung-Chun Wu^1,2 (1. College of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 2. Dept. of Engineering and System Science, National Tsing Hua Univ. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))