Presentation Information
[6-27]Investigation of Asymmetric Ferroelectric Switching in AlScN MFM Capacitors
*Hirofumi Nishida1, Si-Meng Chen1, Takuya Hoshii1, Kazuo Tsutsui1, Hitoshi Wakabayashi1, Kuniyuki Kakushima1 (1. Institute of Science Tokyo (Japan))
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