[6] Poster Session

[6-29] All-in-one Monolithic 3D Heterostructured Integration of BEOL- Complementary N-Si FinFET / P-CNFET for Smart Edge Processing

*SHUANG Liu^1,2, Feixiong Wang^1,2, Heyi HUANG^1,2, Yadong Zhang^1,2, Yanqing Li^1,2, Yanzhao Wei^1,2, Huaxiang Yin^1,2 (1. State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of the Chinese Academy of Sciences (China), 2. School of Integrated Circuits, University of Chinese Academy of Sciences (China))