[7] Advanced Electronics on New Materials

10:15 AM - 10:35 AM JST(1:15 AM - 1:35 AM UTC)

[7-06] Poly-Si Nanosheet FETs With Vertical C-Shaped Channel Using Pulse Laser Crystallization

Jinbiao Liu², Zhuo Chen², Yongkui Zhang², Junfeng Li², Xianglie Sun¹, *Shujuan Mao¹, Guilei Wang¹, Chao Zhao¹, Huilong Zhu², Jun Luo² (1. Beijing Superstring Academy of Memory Technology (China), 2. Institute of Microelectronics, Chinese Academy of Sciences (China))