[9] Interfaces and Reliability Engineering

1:55 PM - 2:15 PM JST(4:55 AM - 5:15 AM UTC)

[9-02] O/H Supercritical Fluid Passivation on Stacked Ge_0.95Si_0.05 Nanosheet nFETs

*Min-Kuan Lin¹, Ding-Wei Lin², Jui-Yu Hsu², Guan-Hua Chen², Bo-Hui Yu³, Wei-Jen Chen², Bo-Wei Huang², Tao Chou¹, Yi-Chun Liu², Yu-Rui Chen², Hong-Yi Tu⁴, Ting-Chang Chang⁵, C. W. Liu^1,2,3 (1. Graduate School of Advanced Tech., National Taiwan Univ. (Taiwan), 2. Graduate Inst. of Electronics Eng., National Taiwan Univ. (Taiwan), 3. Graduate Inst. of Photonics and Optoelectronics, National Taiwan Univ. (Taiwan), 4. Department of Materials and Optoelectronic Sci., National Sun Yat-Sen Univ. (Taiwan), 5. Department of Physics, National Sun Yat-Sen Univ. (Taiwan))