[C-11] シリコン材料・デバイス

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Candidate for Academic Incentive AwardCareer Explorer

[C-11-01] Fabrication of Functional Micro-rolls on Silicon Wafer and its Structural Control

◎△Yodai Ashikubo¹, Toshiaki Suzuki¹, Masaaki Niwa¹, Mitsuya Motohashi¹ (1. Tokyo Denki Univ.)

Keywords:

Silicon roll,Silicon tube,Anodization,Microstructural Control