Presentation Information

[C-3_C-4-03](Invited Presentation 30min.) Fabrication of optical link for co-packaged optics using UV nanoimprint stepper

〇Fumi Nakamura1, Kenta Suzuki1, Akihiro Noriki1, Satoshi Suda1, Takayuki Kurosu1, Takeru Amano1 (1. National Institute of Advanced Industrial Science and Technology (AIST))

Keywords:

Co-packaged optics,Silicon photonics,Polymer waveguide,CPO,Nanoimprint