Presentation Information
[C-3_C-4-03](Invited Presentation 30min.) Fabrication of optical link for co-packaged optics using UV nanoimprint stepper
〇Fumi Nakamura1, Kenta Suzuki1, Akihiro Noriki1, Satoshi Suda1, Takayuki Kurosu1, Takeru Amano1 (1. National Institute of Advanced Industrial Science and Technology (AIST))
Keywords:
Co-packaged optics,Silicon photonics,Polymer waveguide,CPO,Nanoimprint