[C-3_C-4] 光エレクトロニクス／レーザ・量子エレクトロニクス

11:30 AM - 12:00 PM JST(2:30 AM - 3:00 AM UTC)

[C-3_C-4-03] (Invited Presentation 30min.) Fabrication of optical link for co-packaged optics using UV nanoimprint stepper

〇Fumi Nakamura¹, Kenta Suzuki¹, Akihiro Noriki¹, Satoshi Suda¹, Takayuki Kurosu¹, Takeru Amano¹ (1. National Institute of Advanced Industrial Science and Technology (AIST))

Keywords:

Co-packaged optics,Silicon photonics,Polymer waveguide,CPO,Nanoimprint