[CI-4] バイオセンシング技術の新展開

11:15 AM - 11:45 AM JST(2:15 AM - 2:45 AM UTC)

[CI-4-06] Biological Sensing by Micromechanical Structures Fabricated by Si-MEMS Technology

〇Masayuki Sohgawa¹ (1. Niigata University)

Keywords:

MEMS,Tactile Sensor,Biological Sensor,Cantilever