[C-3_C-4] Optoelectronics / Lasers and Quantum Electronics

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[C-3_C-4-37] Pt/WO₃-SiO₂膜を有するシリコン微小リング共振器光学式水素ガスセンサーの高感度化

〇Ayumu Sato¹, Yuta Eto¹, Shinji Okazaki², Yoshiaki Nishijima^2,3, Taro Arakawa^2,3 (1. graduate School of Engineering Science YNU, 2. graduate School of Eng YNU, 3. Semiconductor and Quantum Integrated Electronics Research Center (SQIE) YNU)

Keywords:

Hydrogen Gas Sensor