[C-3_C-4] Optoelectronics / Lasers and Quantum Electronics

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Candidate for Academic Incentive Award

[C-3_C-4-03] Investigation of fabrication MEMS Wavelength-Control Devices toward Integration of Heterogeneous Materials and MEMS on SOI Substrates

◎Daiki Sakurai¹, Yoshishige Tsuchiya², Keita Nakamura¹, Yoshitaka Oiso¹, Kaibin Yao¹, Haoyu Chen¹, Eissa Moataz¹, Tsuyoshi Horikawa¹, Keisuke Kawahara¹, Nobuhiko Nishiyama^1,3 (1. ISCT, 2. University of Southampton , 3. Next-generation Semiconductor Eco-system Co-creation Center, Institute of Science Tokyo)

Keywords:

Integrated Optical Devices

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