[C-3_C-4] Optoelectronics / Lasers and Quantum Electronics

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Candidate for Academic Incentive Award

[C-3_C-4-03] Investigation of fabrication MEMS Wavelength-Control Devices toward Integration of Heterogeneous Materials and MEMS on SOI Substrates

◎Daiki Sakurai¹, Yoshishige Tsuchiya², Keita Nakamura¹, Yoshitaka Oiso¹, Kaibin Yao¹, Haoyu Chen¹, Eissa Moataz¹, Tsuyoshi Horikawa¹, Keisuke Kawahara¹, Nobuhiko Nishiyama^1,3 (1. ISCT, 2. University of Southampton , 3. Next-generation Semiconductor Eco-system Co-creation Center, Institute of Science Tokyo)

Keywords:

Integrated Optical Devices

In recent years, performance requirements for optical integrated circuits have been increasing in tandem with the widespread adoption of AI and IoT services. To date, we have proposed a process that integrates heterogeneous material integration technology with optical MEMS technology to enhance the functionality of optical integrated circuits. In this report, we examine a fabrication process for MEMS-type wavelength control devices on SOI substrates, incorporating self-aligned two-step etching and an etch-stop layer made of Al₂O₃, and present the results of demonstrations of the constituent processes.