Presentation Information
[C-3_C-4-11]RCWA 法を用いた裏面入射型フォトダイオードの受光感度向上検討
〇Kosuke Shinohara1, Koki Izumi1, Ryota Takemura1, Harunaka Yamaguchi1, Eitaro Ishimura1 (1. Mitsubishi electric corporation)
Keywords:
Photodiode,RCWA,Photonic Crystal
Photodiode,RCWA,Photonic Crystal