Presentation Information

[C-3_C-4-43]Pt-SiO₂膜装荷Si微小リング共振器型水素ガスセンサの高感度化

◎△Ryuki Saito1, Ayumu Sato1, Shinji Okazaki1, Yoshiaki Nishijima1,2, Taro Arakawa1,2 (1. Graduate School of Engineering, Yokohama National University, 2. Semiconductor and Quantum Integrated Electronics (SQIE) Research Center)

Keywords:

Silicon Photonics,Microring Resonator,Hydrogen Sensor

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