Presentation Information
[C-3_C-4-43]Pt-SiO₂膜装荷Si微小リング共振器型水素ガスセンサの高感度化
◎△Ryuki Saito1, Ayumu Sato1, Shinji Okazaki1, Yoshiaki Nishijima1,2, Taro Arakawa1,2 (1. Graduate School of Engineering, Yokohama National University, 2. Semiconductor and Quantum Integrated Electronics (SQIE) Research Center)
Keywords:
Silicon Photonics,Microring Resonator,Hydrogen Sensor
