Presentation Information
[C-3_C-4-45]高精度LiDARを用いたシリコンウエハの屈折率分散の測定
◎Hiroki Yamazaki1, Takahiro Nagata1, Chao Zhang2,3, Fumihiko Ito1, Shingo Ohno4, Atsushi Nakamura4, Kunihiro Toge4 (1. Shimane Univ., 2. Kogakuin Univ., 3. Tokyo Univ., 4. NTT)
Keywords:
FMCW LiDAR,Refractive Index