[C-6] Electronic Component Parts and Materials

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[C-6-03] 高キャリア濃度InN薄膜の可視-近赤外光学特性

〇Takatora Yamada¹, Hiroyasu Ishikawa¹ (1. Shibaura Institute of Technology)

Keywords:

Semiconductor,Indium nitride,Ellipsometer,RF magnetron sputtering method

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