[C-6] Electronic Component Parts and Materials

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[C-6-05] RFマグネトロンスパッタリング法によるCo₃O₄薄膜の作製とp-Co₃O₄/n-Siヘテロ接合の特性

〇Kaede Ito¹, Hiroyasu Ishikawa¹ (1. Shibaura Institute of Technology)

Keywords:

Oxide Semiconductor,Solar Cell,RF Magnetron Sputtering Method,Thin film

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