Presentation Information
[PS-02-24]Improvement of Cell Characteristics using Localized Doping for Convex and Concave Channel Structures in 3D NAND Flash
Daewoong Kang1, 〇Siwon Park1,2, Hojun Lee1,3, Hoyeon Ko1,3, Jeongnam Youn1, Youngho Jung4 (1. Seoul National University (Korea), 2. Soongsil University (Korea), 3. Chung-Ang University (Korea), 4. Daegu University (Korea))
