[17p-B3-1~18] 6.1 強誘電体薄膜

14:15 〜 14:30奨励賞エントリー英語発表

[17p-B3-6] Non-destructive measurement of longitudinal piezoelectric properties for thin films

〇Aphayvong Sengsavang¹, Meika Takagi¹, Yohane Fujibayashi¹, Kira Fujihara¹, Shuichi Murakami², Hidemasa Yamane², Norifumi Fujimura¹, Takeshi Yoshimura¹ (1.Osaka Metro. Univ, 2.ORIST)

キーワード：

piezoelectric

To develop piezoelectric MEMS devices, piezoelectric properties of thin films are commonly characterized in terms of the transverse piezoelectric coefficient e31,f, which is effective to account for the constraint of the film and substrate.However, the measurement of the e31,f constants is a destructive test, e.g. by cutting the sample into a cantilevered beam shape. In this study, the possibility of measuring the d33 coefficient by a quasi-static method using the direct piezoelectric effect as a non-destructive piezoelectric evaluation method is investigated.